Fabrication of Thin Film Titania with Nanopoles and Nanopipes

Abstract

We demonstrate a formation of thin film titania (TiO2) with dense array of nanopores, nanopoles, and nanopipes. The heights of pores, poles and pipes are about 130 nm, 180 nm, 200 nm, respectively. The aspect ratio of these three structures is approximated between 2 and 3.