Optimization of GGNMOS Devices for High-Voltage ESD Protection in BCDLite Technology

Prantik Mahajan, Raunak Kumar, R. Gauthier, K. Hwang
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引用次数: 2

Abstract

Design optimization of Electrostatic Discharge (ESD) GGNMOS for high-voltage applications in low-cost BCDLite technology is reported. Clamp performance optimization through body PWELL engineering and device design techniques are investigated. A comparative analysis between two distinct device architectures (different Poly-LOCOS overlap) showing 100ns TLP measurement and TCAD simulation results is presented.
BCDLite技术中用于高压ESD保护的GGNMOS器件的优化
报道了用于低成本BCDLite技术的高电压静电放电(ESD) GGNMOS的优化设计。通过本体PWELL工程和器件设计技术对夹具性能进行优化研究。在两种不同的器件架构(不同的Poly-LOCOS重叠)之间进行了比较分析,显示了100ns TLP测量和TCAD仿真结果。
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