A statistical approach for measuring dislocations in 2D photonic crystals

Radu Malureanu, Lars Hagedorn Frandsen
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引用次数: 3

Abstract

In this paper, a comparison between the placement accuracy of lattice atoms in photonic crystal structures fabricated with different lithographic techniques is made. Using atomic force microscopy measurements and self-developed algorithms for calculating the holes position within less than 0.01 nm error, we establish the statistical disorder within such devices.
测量二维光子晶体位错的统计方法
本文比较了不同光刻技术制备的光子晶体结构中晶格原子的放置精度。利用原子力显微镜测量和自行开发的计算孔洞位置的算法,在小于0.01 nm的误差范围内,我们建立了这些器件内的统计无序。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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