Fast and accurate method for flaws localization in stacked die packages from acoustic microscopy echoes transients

Patrick Martin, A. El Matouat, S. Legendre, A. Colder, P. Descamps
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引用次数: 2

Abstract

The scanning acoustic microscopy (SAM) is widely used today by the manufacturers and researchers in failure analysis labs to improve the microelectronic devices reliability. The goal is to detect and locate flaws inside chips using non destructive test (NDT). New packaging technologies improve the number of layers in a single package using advancing formats including for example flip chip, ball grid array and thereby increasing the number of interfaces to study. This paper deals with the automatic detection of small flaws in the z-axis to reduce time of experiment and facilitate the localization of the flaws especially in solder bump joints and underfill.
基于声学显微镜回波瞬态的叠片封装缺陷快速准确定位方法
扫描声显微镜(SAM)技术被广泛应用于微电子器件的故障分析实验室,以提高微电子器件的可靠性。目标是使用无损检测(NDT)来检测和定位芯片内部的缺陷。新的封装技术使用先进的格式(例如倒装芯片、球栅阵列)提高了单个封装中的层数,从而增加了需要研究的接口数量。本文研究了z轴小缺陷的自动检测,减少了实验时间,便于缺陷的定位,特别是在凸点和下填点。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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