{"title":"Mechanism and application of capillary-force self-assembly micro/nanofabrication","authors":"Shuhua Wei, Minglong Qin, Jing Zhang","doi":"10.1109/3M-NANO.2016.7824940","DOIUrl":null,"url":null,"abstract":"Self-assembly has attracted increasing attention as an effective strategy for fabrication of functional micro/nanostructures in recent years. Capillary-force as a significant driving force of self-assembly has become a versatile and scalable approach to build complex geometries at the micro/nanoscales. In order to take full advantage of capillary-force to fabricate specific micro/nanoscales devices, we have done a thorough research on the mechanism of capillary-force self-assembly and analyzed the impact factors of micro/nanostructures suffered during the self-assembly process. In the aspect of application, we classified the main assembly methods, micro/nanostructures which can be got and their potential applications. Finally, we indicated that capillary-force self-assembly would have broad utilization in micro/nanofabrication due to its tunability and simplicity. Meanwhile, we put forward some issues that need to be solved in the further research.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2016.7824940","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
Self-assembly has attracted increasing attention as an effective strategy for fabrication of functional micro/nanostructures in recent years. Capillary-force as a significant driving force of self-assembly has become a versatile and scalable approach to build complex geometries at the micro/nanoscales. In order to take full advantage of capillary-force to fabricate specific micro/nanoscales devices, we have done a thorough research on the mechanism of capillary-force self-assembly and analyzed the impact factors of micro/nanostructures suffered during the self-assembly process. In the aspect of application, we classified the main assembly methods, micro/nanostructures which can be got and their potential applications. Finally, we indicated that capillary-force self-assembly would have broad utilization in micro/nanofabrication due to its tunability and simplicity. Meanwhile, we put forward some issues that need to be solved in the further research.