Tzu-Hsuan Hsu, Chao-Yu Chen, Chun-You Liu, Ming-Huang Li, Shenz-Shian Li
{"title":"A 200-nm-gap Titanium Nitride Composite CMOS-MEMS CMUT for Biomedical Ultrasounds","authors":"Tzu-Hsuan Hsu, Chao-Yu Chen, Chun-You Liu, Ming-Huang Li, Shenz-Shian Li","doi":"10.1109/FCS.2018.8597500","DOIUrl":null,"url":null,"abstract":"A low-pressure sealed capacitive micromachined ultrasonic transducer (CMUT) is presented with a narrow transducer gap (<200 nm) to enable efficient capacitive transduction while a circuit-integration scheme for SNR improvement is implemented based on a tailored titanium nitride composite (TiN-C) monolithic CMOS-MEMS platform [1]. In this study, Parylene-C is selected as an encapsulation material after structural release that not only offers excellent deposition uniformity but also provides proper acoustic impedance for biomedical applications. In this work, a prototyped single-channel DI water-immersed ultrasound receiver consists of a $5\\times 4$ CMUT array that was composed of $45\\mu\\mathbf{m}\\times30\\mu\\mathbf{m}$ subarray membranes paired with a 20 dB fixed-gain amplifier is characterized using a standard pulser (Olympus 5072PR) and an unfocused ultrasonic probe (Panametrics-NDT C310) at 12 mm distance atop, after data calibration by a hydrophone (ONDA HNR-1000), the TiN-C CMUT exhibits a receiving sensitivity of 2.28 m V IkPa with only 40 V of dc bias.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"178 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE International Frequency Control Symposium (IFCS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FCS.2018.8597500","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
A low-pressure sealed capacitive micromachined ultrasonic transducer (CMUT) is presented with a narrow transducer gap (<200 nm) to enable efficient capacitive transduction while a circuit-integration scheme for SNR improvement is implemented based on a tailored titanium nitride composite (TiN-C) monolithic CMOS-MEMS platform [1]. In this study, Parylene-C is selected as an encapsulation material after structural release that not only offers excellent deposition uniformity but also provides proper acoustic impedance for biomedical applications. In this work, a prototyped single-channel DI water-immersed ultrasound receiver consists of a $5\times 4$ CMUT array that was composed of $45\mu\mathbf{m}\times30\mu\mathbf{m}$ subarray membranes paired with a 20 dB fixed-gain amplifier is characterized using a standard pulser (Olympus 5072PR) and an unfocused ultrasonic probe (Panametrics-NDT C310) at 12 mm distance atop, after data calibration by a hydrophone (ONDA HNR-1000), the TiN-C CMUT exhibits a receiving sensitivity of 2.28 m V IkPa with only 40 V of dc bias.