Silicon-on-Insulator (SOI) Slot Waveguide for Methane Absorption Sensing in the Mid-Infrared

Optical Sensors and Sensing Congress 2022 (AIS, LACSEA, Sensors, ES) Pub Date : 1900-01-01 DOI:10.1364/es.2022.em1d.2

H. D. Yallew, M. Vlk, Anurup Datta, S. Alberti, Jens Høvik, A. Aksnes, M. Greve, J. Jágerská

引用次数: 2

Abstract

We demonstrate SOI slot waveguides for highly sensitive on-chip detection of methane using tunable diode-laser absorption spectroscopy in the mid-infrared. 1.7 ppm limit of detection has been shown with a 1 cm long slot waveguide.

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中红外甲烷吸收传感用绝缘体上硅(SOI)槽波导

我们展示了SOI槽波导用于中红外可调谐二极管激光吸收光谱的高灵敏度片上甲烷检测。1.7 PPM的检测极限已显示与1厘米长的槽波导。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Optical Sensors and Sensing Congress 2022 (AIS, LACSEA, Sensors, ES)

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