Low-loss silicon rectangular waveguides fabricated by anisotoropic wet etching for roughness reduction

Abstract

Simple fabrication of low-loss Si/SiO2 waveguides with a flat side wall is proposed. Waveguides oriented to the <;11-2> direction on the Si (110) plane are fabricated by anisotropic wet etching and the lowest propagation loss is 1.4 dB/cm.