Property uniformity and poling behavior of PMN-PT crystal grown by vertical gradient freeze method

Zi-bo Jiang
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引用次数: 1

Abstract

3-Inch diameter PMN-PT ingots were grown along [001] direction using Vertical Gradient Freeze (VGF) method. Wafers are sliced, sequentially numbered and tested for the study of property distribution along the ingot, and samples from the same wafer were studied for in-wafer uniformity. As a result, [001] grown and poled PMN-PT crystals typically have electromechanical coupling coefficient k33 higher than 0.91, and free relative permittivity between 4,600 and 7,500, varying monotonically along the ingot, due to PT composition segregation. In-wafer free relative permittivity variation coefficient is measured within 2%, due to sufficient agitation during growth. It is also shown that piezoelectric properties saturate around 350 kV/mm for PMN-0.29PT and 250 kV/mm for PMN-0.31PT, respectively. Both PMN-0.29PT and PMN-0.31PT experience property degradation due to over-poling over 1300 kV/mm, and PMN-0.31PT is more susceptible to over-poling due to closer vicinity to the Morphotropic Phase Boundary (MPB). It is thought that over-poling is a field-induced phase transition and such transition is found reversible by annealing at certain elevated temperatures.
垂直梯度冷冻法生长PMN-PT晶体的性能均匀性和极化行为
采用垂直梯度冷冻(VGF)方法沿[001]方向生长3英寸直径的PMN-PT锭。对晶圆片进行切片、顺序编号和测试,以研究沿铸锭的性能分布,并研究来自同一晶圆片的样品在晶圆内的均匀性。因此,[001]生长和极化的PMN-PT晶体通常具有机电耦合系数k33高于0.91,自由相对介电常数在4,600至7,500之间,由于PT成分偏析,沿铸锭单调变化。晶圆内自由相对介电常数变化系数测量在2%以内,由于在生长过程中充分搅拌。PMN-0.29PT和PMN-0.31PT的压电性能分别在350 kV/mm和250 kV/mm左右达到饱和。PMN-0.29PT和PMN-0.31PT均因超过1300 kV/mm的过极化而性能下降,PMN-0.31PT更容易受到过极化的影响,因为它更靠近形态取向相边界(MPB)。认为过极化是一种场致相变,这种相变在一定的高温退火条件下是可逆的。
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