Anticipating faults by predicting non-linearity of environment variables with neural networks: a case study in semiconductor manufacturing

Abstract

The present work proposes a neural network model capable of anticipating possible faults in a semiconductor manufacturing plant by predicting non-linearity spikes in sensor data. Early detection of significant variation can be crucial for identifying machinery degradation or issues in the process itself. We use non-linearity as it is not affected by regular process changes and autocorrelation, thus avoiding false positives in the neural network caused by changes in demand and the presence of control systems. The developed model is able to predict up to 30min of future non-linearity with loss ≤ 0.5. Furthermore, the proposed model is flexible enough to present itself as a starting point for future work in the field of fault detection in other areas.