Microassembly of hybrid magnetic MEMS

Abstract

A general assembly strategy for assembling hybrid magnetic MEMS devices is proposed. The scaling of MEMS devices leads to the dominance of surface-effect forces such as electrostatic, surface-tension and van der Waals forces. The contact phase of an assembly task is complicated by the presence of these surface-effect forces and magnetic forces. Assembly strategies must account for the presence of these forces in order to guarantee successful repeatable assemblies. A detailed model for the magnetic interaction of microparts is developed and experimentally verified. This model is used to synthesize assembly strategies for micromagnetic parts. A flexible automated assembly workcell has also been developed to validate and demonstrate the proposed microassembly strategies.