Compact modeling and digital twins of capacitive fractal microsystems: characteristics variations caused by heavy charged particles

Abstract

Micro electromechanical systems are widely used in different equipment, including those installed on spacecrafts, when they are exposed to several harmful factors, including radiation. The most correct approach to examine microsystems radiation tolerance is filed tests. However, the tests are difficult and expensive. This paper presents compact models of capacitive fractal systems for characteristics variations caused by heavy charged particles. Different approximation functions were chosen and then compared. Conclusion are derived about suitability of the approaches for further study and design of digital twins.