Modelling squeeze film damping in packaged energy harvesters

Abstract

We investigate the effects of fluidic damping on MEMS packaged energy harvesters using numerical simulations in COMSOL Multiphysics. In particular, we compare two models for including squeeze film damping in the case where the harvester is operating close to a wall; an equivalent mass damping based on approximate modal coefficients and the numerical solution of the Reynolds equation in the air gap between the wall and the structure. The models are evaluated on a bridge design harvester intended for automotive applications.