Investigation on surface figure control technology of medium-aperture optical component based on double-sided polishing

Abstract

Based on the motion mechanism of double-sided polishing, the motion trajectory model of polishing pad relative to medium-aperture optical components was established. This research simulated the trajectory of the abrasive particle relative to the optical component, and then the trajectory was obtained under different processing parameters. Based on the simulation results, different processing parameters were optimized which had been used for double-sided polishing experiments of optical components. The surface roughness and figure of both sides of the optical component after double-sided polishing were detected. The detection results showed that the surface roughness approached 0.5nmRMS, and the surface figure was 0.5λ(λ=632.8nm) for 150mm×150mm×7mm specification medium-aperture optical components.