Cryogenic wafer-level MWIR camera: laboratory demonstration

G. Druart, F. de la Barrière, M. Chambon, N. Guerineau, G. Lasfargues, M. Fendler
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引用次数: 1

Abstract

We present a compact infrared cryogenic multichannel camera with a wide field of view equal to 120°. By merging the optics with the detector, the concept has to be compatible with both cryogenic constraints and wafer-level fabrication. For this, we take advantage of the progress in micro-optics to design a multichannel optical architecture directly integrated on the detector. This wafer-level camera uses state of art microlenses with a high sag height. The additional mass of the optics is sufficiently small to be compatible with the cryogenic environment of the Dewar. The performance of this camera will be discussed. Its characterization has been carried out in terms of modulation transfer function and noise equivalent temperature difference (NETD). The optical system is limited by the diffraction. By cooling the optics, we achieve a very low NETD equal to 15 mK compared with traditional infrared cameras. A postprocessing algorithm that aims at reconstructing a well-sampled image from the set of undersampled raw subimages produced by the camera is proposed and validated on experimental images.
低温晶圆级MWIR相机:实验室演示
我们提出了一种紧凑的红外低温多通道相机,其宽视场等于120°。通过将光学器件与探测器相结合,该概念必须与低温限制和晶圆级制造相兼容。为此,我们利用微光学的最新进展,设计了直接集成在探测器上的多通道光学结构。这款晶圆级相机采用了高下垂高度的微透镜。光学元件的额外质量足够小,可以与杜瓦瓶的低温环境相适应。我们将讨论这台相机的性能。用调制传递函数和噪声等效温差(NETD)对其进行了表征。光学系统受衍射的限制。通过冷却光学元件,与传统红外相机相比,我们实现了非常低的NETD,相当于15 mK。提出了一种从相机产生的欠采样原始子图像集重建良好采样图像的后处理算法,并在实验图像上进行了验证。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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