Laser sintering of polycrystalline Ge-Sn films

Md. Toriqul Islam, M. Gupta
{"title":"Laser sintering of polycrystalline Ge-Sn films","authors":"Md. Toriqul Islam, M. Gupta","doi":"10.1109/GFP51802.2021.9673991","DOIUrl":null,"url":null,"abstract":"A laser sintering fabrication process to deposit 3 µm thick GeSn films on silicon substrates has been demonstrated. A 2% tin was incorporated in germanium to increase p-type mobility. High hole mobility of 166.2 cm2/v.s was achieved for laser-sintered polycrystalline GeSn films.","PeriodicalId":158770,"journal":{"name":"2021 IEEE 17th International Conference on Group IV Photonics (GFP)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 IEEE 17th International Conference on Group IV Photonics (GFP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/GFP51802.2021.9673991","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

Abstract

A laser sintering fabrication process to deposit 3 µm thick GeSn films on silicon substrates has been demonstrated. A 2% tin was incorporated in germanium to increase p-type mobility. High hole mobility of 166.2 cm2/v.s was achieved for laser-sintered polycrystalline GeSn films.
多晶锗锡薄膜的激光烧结
研究了在硅衬底上沉积3µm厚GeSn薄膜的激光烧结工艺。在锗中加入2%锡以提高p型迁移率。高空穴迁移率为166.2 cm2/v。激光烧结的多晶GeSn薄膜得到了s。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信