Electrical scanning probe microscopes to address industrial nano-metrology needs of integrated circuits and nanoelectronic devices

Abstract

Electrical modes of scanning probe microscopes have found considerable metrology applications in integrated circuits and emerging nano-electronic devices. This paper will review the critical metrology needs that electrical SPMs have addressed in the integrated circuit industry and further applications for the characterization of nano-electronic devices. Solutions to metrology problems addressed by electrical SPM modes including the scanning capacitance microscope (SCM), scanning Kelvin force microscope (SKFM), scanning microwave microscope (SMM), scanning spreading resistance microscope (SSRM), conductive-AFM (c-AFM), and magnetic force microscopy (MFM) will be reviewed.