Polymer-based bio-electrofluidic multi-chip module

Abstract

We present a bio-electro fluidic multi-chip module based on the novel polymer fabrication process using UV-direct patterning of hyper-branched polymer, AEO3000. Compared to. PDMS, which is most widely used polymer in bio MEMS devices, the present polymer has advantages of electrode integration and fast fabrication process. We design 4-chip module, having three electrical pads and two fluidic I/O ports. We integrate a microfluidic mixer and a cell separator on the module to characterize the interconnection performance and sample manipulation. In the electrical and fluidic characterization, the measured electrical contact resistance was 0.75±0.44Ω which is. small enough for electrical application, while the pressure drop of 8.3kPa was 39.3% the value of tubing method. We successfully demonstrate bio-sample manipulation through the interconnected chips using yeast mixing and separation test in the multi-chip module. The proposed device and process offers fast and bio-compatible method applicable to biomedical analysis systems.