L. Golonka, A. Dziedzic, H. Roguszczak, S. Tankiewicz, Damian Terech
{"title":"Novel technological and constructional solutions of pressure sensors made in LTCC technology","authors":"L. Golonka, A. Dziedzic, H. Roguszczak, S. Tankiewicz, Damian Terech","doi":"10.1117/12.435912","DOIUrl":null,"url":null,"abstract":"This paper describes the design, technology aspects and exploitation parameters of thick film pressure sensors manufactured in LTCC technology.","PeriodicalId":405495,"journal":{"name":"Optoelectronic and Electronic Sensors","volume":"273 2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"8","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optoelectronic and Electronic Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.435912","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 8
Abstract
This paper describes the design, technology aspects and exploitation parameters of thick film pressure sensors manufactured in LTCC technology.