5-Bit Spiral Distributed RF MEMS Phase Shifter

Abstract

A new spiral distributed radio frequency micro-electromechanical system (RF MEMS) phase shifter which uses 31 MEMS switches to achieve 5-bit phase shifts is designed in this paper. The area of the phase shifter is 2.6×2.6 mm2. The simulation results of phase shift are 11.43°, 23.04°, 44.53°, 91.73° and 182.65° when the central operating frequency is 40 GHz. The deviations of the design target are 0.18°, 0.54°, 0.47°, 1.73° and 2.65°, respectively. Insertion loss and return loss are -15.1092 dB/-8.9120 dB, -14.2271 dB/-9.9053 dB, -15.1092 dB/-8.9120 dB, -13.2439 dB/-11.6679 dB and -16.3046 dB/-10.2057dB, respectively. The simulation results and phase shift accuracy of the 31 phase shifts of RF MEMS phase shifter are given, and the deviation of the design target is within 3.72°. It realizes the requirements of RF MEMS phased array system. This phase shifter has the advantages of high frequency, small size, high precision, low loss and low cost.