CMOS Compatible Color Photodiode for LOC Applications

Abstract

This paper presents a custom design and analysis of a CMOS-compatible, color-segregating photodiode design for Lab-on-a-Chip applications. The design is based on minimal post-processing of a CMOS photodiode circuit to achieve improved segregation of red, green, and blue wavelengths. Lower wavelengths are blocked by depositing blocking materials (polysilicon, silicon nitride) of different thicknesses. Diodes compatible with the process are used for collecting the electron-hole pairs. We have used the 180 nm TSMC process for our design and analysis, but it is applicable to other processes as well.