Test structures to support the development and process verification of microelectrodes for high temperature operation in molten salts

E. Blair, D. Corrigan, I. Schmueser, J. Terry, Stewart Smith, Andrew R. Mount, Anthony J. Walton
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引用次数: 2

Abstract

This paper reports the design and application of test structures used for the development and characterisation of microelectrodes for operation in the harsh, caustic environment of molten salts operating at 450°C. These structures have been employed to evaluate the effect of electrode area and the dielectric integrity of insulating layers in the molten salt. This has been useful in identifying failures mechanisms, which has facilitated the optimisation of both the design and fabrication of the microelectrodes while at the same time also providing valuable information for process verification.
支持在熔盐中高温操作的微电极的开发和工艺验证的测试结构
本文报道了用于开发和表征微电极的测试结构的设计和应用,这些微电极可在450°C的熔融盐苛刻的腐蚀性环境中工作。这些结构被用来评价熔盐中电极面积和绝缘层介电完整性的影响。这在识别失效机制方面非常有用,这有助于优化微电极的设计和制造,同时也为工艺验证提供了有价值的信息。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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