Gun hard inertial measurement unit based on MEMS capacitive accelerometer and rate sensor

S. Habibi, S. Cooper, J. Stauffer, B. Dutoit
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引用次数: 35

Abstract

Smart munitions and missiles are increasingly incorporating inertial measurement units for guidance of short range weapon systems. In addition to usual high performance of the required sensors, namely, accelerometers and gyros, this application requires high shock survivability and post shock stability of the sensors. Colibrys has successfully developed a gun hard version of its accelerometer product and AIS has integrated these acceleration sensors and rate gyro to a gun hard IMU. The IMU has been extensively tested and characterized over the full temperature range, at Aerobutt and in many live shooting trials. The extreme shock performance of the IMU has been maintained by making the accelerometer shock resistant. This has been achieved by placing a specially designed mechanical stopper over the sensing element to protect the sensor from extreme shock levels by limiting the mechanical displacement of the MEMS element. This approach has resulted in excellent post shock performance of the acceleration sensor. Beyond this a special assembly technology has been developed at AIS to ensure that key shock components are filtered out and their energy is not transferred into the sensing element; and the vibrating elements are not affected by the components of the firing shock.
基于MEMS电容式加速度计和速率传感器的火炮硬惯性测量单元
智能弹药和导弹越来越多地采用惯性测量单元来制导近程武器系统。除了通常所需的高性能传感器,即加速度计和陀螺仪外,该应用还要求传感器具有高冲击生存能力和冲击后稳定性。Colibrys公司已经成功开发了一款枪用加速度计产品,AIS公司已经将这些加速度传感器和速率陀螺仪集成到一个枪用IMU上。IMU已经在整个温度范围内,在Aerobutt和许多实弹射击试验中进行了广泛的测试和表征。通过使加速度计抗冲击,IMU的极端冲击性能得以保持。这是通过在传感元件上放置一个专门设计的机械挡板来实现的,通过限制MEMS元件的机械位移来保护传感器免受极端冲击水平的影响。这种方法使加速度传感器具有良好的冲击后性能。除此之外,AIS还开发了一种特殊的装配技术,以确保关键的冲击组件被过滤掉,并且它们的能量不会转移到传感元件中;振动元件不受发射冲击分量的影响。
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