Quality Hg1-xCdxTe films grown by the modified melt-etch liquid phase epitaxy method

Biao Li, Y. Gui, J. Zhu, J. Chu
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Abstract

Hg1-xCdxTe films were grown by a modified meltetch liquid phase epitaxial (LPE) technique which includes both substrate and epilayer etchback steps. The crystal quality of epilayer has been investigated by means of transmission electron microscope (TEM), scanning electron microscope (SEM), and double crystal x-ray rock curve (XRD). It has been found that adequate meltetch of the substrate at the beginning of LPE provides a fresh and flat surface for epitaxial growth, while epilayer meltetch at the end of LPE may prevent spurious and melt sticking.
用改性熔蚀液相外延法生长高质量的Hg1-xCdxTe薄膜
采用改进的熔融液相外延(LPE)技术生长Hg1-xCdxTe薄膜,该技术包括衬底和涂层蚀刻步骤。采用透射电子显微镜(TEM)、扫描电子显微镜(SEM)和双晶x射线岩石曲线(XRD)对脱毛层的晶体质量进行了研究。研究发现,在LPE开始时,衬底的适当熔敷为外延生长提供了一个新鲜而平坦的表面,而在LPE结束时,涂层熔敷可以防止虚假和熔体粘附。
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