Design of a high voltage fully differential driver for a double axis scanning micromirror

Abstract

The design of a high voltage fully differential driver in a 0.18 µm Bipolar-CMOS-DMOS (BCD) technology for the actuation of a double axis scanning micromirror is presented. The proposed circuit has a driving voltage capability up to 25 V and a low Total Harmonic Distortion in order to prevent the excitation of unwanted micromirror's higher resonating modes. This design features a low voltage input stage and a programmable output common mode voltage. After a description of the circuit, results of simulations performed with an equivalent electrical model of the micromirror are presented.