A Novel Multiple-Frequency RF-MEMS Resonator with Optimized Electrode Design

Abstract

This paper presents a novel multi-electrode Micro-electro-mechanical system (MEMS) disk resonator vibrating in the whispering gallery modes (WGM). Multi-mode resonance can simultaneously be driven with one pair of electrodes. The performance for each vibration mode strongly depends on the span angles of electrodes, and an optimized angle of 34° is obtained for a resonator of $37 \mu \mathrm{m}$ in radius. With the multi-electrodes configuration, multiple frequencies output of 56-176 MHz with high quality factor $(Q)$ around 10000 are attained for a $37 \mu\mathrm{m}$-radius disk resonator in atmosphere, which has a potential application in tunable multi-frequency RF oscillators and filters.