MBE technology and semiconductor laser material growth

Thin Film Physics and Applications Pub Date : 1998-02-20 DOI:10.1117/12.300715

Guo-Jun Liu, Qianyong Zhang, Han Yang, Xingde Zhang, Xueqian Li, Y. Qu, Xiaowei Song, Xiao-hua Wang

引用次数: 0

Abstract

This paper summarizes the technical characteristics and performance of our newly purchased VG V80H MBE system. Our research work on thin film semiconductor laser materials growth on this system has also been presented here, with some discussion on beam flux stability and growth uniformity et al.

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MBE技术与半导体激光材料的发展

本文综述了新购VG V80H MBE系统的技术特点和性能。本文还介绍了我们在该系统上生长薄膜半导体激光材料的研究工作，并对束流稳定性和生长均匀性等问题进行了讨论。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Thin Film Physics and Applications

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