The Fabrication Method of High Height-to-Diameter Ratio Micro-Wineglass Resonators*

Abstract

This paper presents the fabrication of High Height-to-Diameter Ratio Micro-Wineglass Resonators using glassblowing with thermal decomposition process. CaCO3 is used as the thermal decomposition material in this process in this paper. A number of chips with $200\mu \text{m}$ deep cavities are fabricated and loaded with different doses of CaCO3. The experiment results show that, the $200\mu \text{m}$ deep cavity can blowing a glass spherical shell with the H/DR of 0.79, which is better than the $800\mu \text{m}$ deep cavity glassblowing process without thermal decomposition.