Paper study on thermal conductivity of Al2O3 thin film of different thicknesses on copper substrate under different contact pressures

K. Dinash, D. Mutharasu, Y. Lee
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引用次数: 10

Abstract

Thermal interface resistance of solids is an important factor for heat conduction from one solid to another. Interface resistance disrupts heat flow in systems like CPUs and various solid state devices like LEDs. Interface materials play an important role in heat transport through interface. In this study, Al203 with different thickness was coated on a copper substrate. The overall thermal conductivity of the material is measured at different contact pressures. It was observed that overall thermal conductivity of the system was affected by thickness of the Al2O3. It was also observed that the overall thermal conductivity increases with increasing pressure.
研究了不同接触压力下不同厚度Al2O3薄膜在铜基体上的导热性
固体的热界面阻是影响固体间热传导的重要因素。界面电阻会破坏cpu等系统和led等各种固态器件的热流。界面材料在界面传热中起着重要的作用。本研究将不同厚度的Al203涂覆在铜基体上。在不同的接触压力下测量材料的总体导热性。结果表明,体系的总导热系数受Al2O3厚度的影响。还观察到,总热导率随着压力的增加而增加。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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