A Study Of Closed-Loop Control Of Optical MEMS Device

Abstract

In this study, a digital control system is developed for the microelectromechanical (MEMS) device - Variable Optical Attenuator (VOA). With the closed-loop control circuit, each VOA module implements the functions of power set point tracking and disturbance rejection. Moreover, this control system, with the device, entrusts the VOA module with leading performance, stability, reliability and fast dynamic response.