IC Compatible Saw Devices on GaAs

Abstract

The application of gallium arsenide (GaAs) technology to high frequency digital and microwave integrated circuits is rapidly maturing. The present work considers the additional capabilities afforded by the inherent piezoelectric properties of GaAs. The emphasis of the work is on Surface Acoustic Wave (SAW) device configurations which may eventually be integrated with electronic circuits on the same substrate. The basic transduction and propagation characteristics for Rayleigh waves on <001>,