Poly (vinyl-alcohol) films for microphotonics

Abstract

This paper presents experimental results concerning the influence of additives from a solution of the PVA on the optical properties of the polymer. The refractive index of the poly (vinyl-alcohol) was modified through the addition of inorganic materials and showed values between 1.5 and 2 depending on the compositions and the curing conditions of the polymer. The transmittance indicated values above 80%. The additives we used were metal oxides/inorganic salts. The composition and the deposition processes were optimized to allow a better control of the optical parameters (refractive index, transmittance), to reduce the processing temperatures and to improve photosensitivity. PVA with these new light-sensitive compositions can be easily spin coated onto variety of semiconductor substrate and directly patterned. A process was developed for channel waveguides fabrication.