A study of SAW gas sensing versus gas concentration

1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027) Pub Date : 1999-10-17 DOI:10.1109/ULTSYM.1999.849445

I. V. Anisimkin, V. Anisimkin, C. Caliendo, E. Verona, M. Penza

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引用次数: 7

Abstract

An analytical expression for the SAW sensor gas response versus gas concentration (calibration curve) is deduced, at low gas concentrations, on using the perturbation approach. The calibration curve, the sensitivity (its slope) and the detection limit (threshold value) for a given gas and sorbent membrane, can be controlled by a proper choice of the substrate material and its crystallographic orientation. We show how this property takes place from the anisotropy of the SAW propagation on piezoelectric single crystals, allowing to change the partial contributions to the SAW response through mechanical displacements, coupling constant and temperature coefficient of velocity (TCV). The theoretical predictions are experimentally verified on devices implemented on different orientations of quartz and LiNbO3 substrates, using Pd, Pd:Ni and polyvinyl alcohol (PVA) as sorbent films and humid air as analyte. The lowest threshold value of RH (0.01%) and the highest sensitivity (49 ppm/%) are detected in the PVA/yz-LiNbO3 structure, whose sensitivity is about two orders of magnitude higher than that observed in uncoated LiNbO3.

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SAW气体传感与气体浓度的关系研究

在低气体浓度条件下，利用微扰方法推导出SAW传感器气体响应随气体浓度变化的解析表达式(校准曲线)。对给定气体和吸附膜的校准曲线、灵敏度(其斜率)和检测限(阈值)可以通过适当选择衬底材料及其晶体取向来控制。我们展示了这种特性是如何从压电单晶上SAW传播的各向异性中发生的，允许通过机械位移，耦合常数和速度温度系数(TCV)改变SAW响应的部分贡献。在不同取向的石英和LiNbO3衬底上，以Pd、Pd:Ni和聚乙烯醇(PVA)为吸附膜，以潮湿空气为分析物，实验验证了理论预测。在PVA/yz-LiNbO3结构中检测到最低的RH阈值(0.01%)和最高的灵敏度(49 ppm/%)，其灵敏度比未涂覆的LiNbO3高约两个数量级。

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1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027)

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