Parylene-based fold-and-bond wireless pressure sensor

Abstract

This paper describes the design, fabrication, and characterization of a wireless, flexible, passive pressure sensor that is suitable for long-term intraocular pressure monitoring. The integrated planar MEMS coil and the variable capacitor were constructed using a fold-and-bond technique, which avoids multilayer processes and thus reduces fabrication complications. Parylene-C was the structural and packaging material, which ensures the flexibility and biocompatibility of the sensor. Devices were characterized in both air and liquid environments. A pressure sensitivity of 156 kHz/mmHg and a maximum detectable range of 28 mm were achieved in water.