Recording of 0.1 micron minimum mark size in a new phase change media

Abstract

Inorder to estimate a minimum size for phase-change marks, marks around 0.1 /spl mu/m were recorded on surface recording discs using a far field optical pickup. The shape and uniformity of these marks investigated. The shapes of phase-change marks were investigated by SEM. On the surface recording disc with AgInSbTe phase-change material, the mark size could be reduced to around O.l /spl mu/m in the tangential direction. The fluctuation in mark shape with scaling down of size was hardly recognized.