Optimal parameters determination for nanostructure-enhanced surface acoustic waves sensor

Abstract

Various modifications of the ZnO nanostructures based sensitive element for the two-port surface acoustic wave sensor (SAW) design were considered. The influence of morphometric parameters (diameter and length) of ZnO nanostructures on output SAW sensor characteristics was investigated by finite element simulation method. Obtained versatile flexible multiparameter model allowed the evaluation of performance parameters. The optimal parameters for nanostructure-enhanced SAW sensor design could be estimated by the proposed approach.