Finite Element Simulation Analysis of Temperature Field of MEMS Gas Sensor Based on ANSYS Software

Abstract

MEMS gas sensor reflects the concentration of the target gas in the air through the change of the resistance of the surface sensitiuses. ANSYS software is used to simulate and analyze the structure of the traditional MEMS gas sensor in this paper. By setting different corrosion areas of Si backing, electrode pattern sizes, and the distance between pad pins and lines, the temperature field distribution diagram is simulated and analyzed, which provides a reference basis for the structural design and thermal design of MEMS gas sensors.