Absolute calibration of optical flats using a commercial phase measuring interferometer

C. Evans, W. Estler, Robert E. Parks
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引用次数: 0

Abstract

So called "absolute" calibration of optical flats can be performed using a range of algorithms, each with its own limitations. At NIST we have implemented, and are intercomparing, several techniques.
使用商用相位测量干涉仪对光学平面进行绝对校准
所谓的光学平面的“绝对”校准可以使用一系列算法来执行,每个算法都有自己的局限性。在NIST,我们已经实现并正在相互比较几种技术。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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