MEMS based microstructure array design and its quantitative analysis of micropreconcentrator for cancer biomarker diagnosis

Abstract

We have proposed a high performance MEMS based microstructure array of micropreconcentrator (microPC) for breath diagnosis of cancer biomarkers. Moreover, we have reported in this paper for the first time the quantitative analysis results, which are used as evaluation criteria for determination of microstructure array performance. As a microstructure shape in microPC, we propose a flower leaf type shape. Owing to our new microstructure shape, biomarkers flow can be guided into microstructures and then contact area between biomarkers flow and microstructure surface can be maximized. The design parameters, such as shape, size and configuration of microstructures are studied and determined quantitatively by using particle adsorption model.