Improved Liquid Source Vaporization for CVD & ALD Precursors

Abstract

Many of the advanced gas-phase processes used in state-of-the art microelectronic fabrication place higher demands on liquid vapor delivery solutions. Vaporization challenges include a diverse range of liquids with unique material properties, the use of liquids with low vapor pressure or the use of liquids with a small window between thermal decomposition and vaporization. The growing implementation of short pulse processing also creates a need for faster response times. The Performance Enhanced Turbo-VaporizerTM Liquid Delivery System presents a new alternative for liquid vaporization.