Optimization of thickness distribution of micro-membrane by genetic algorithm

H. Kotera, M. Senga, T. Hirasawa, S. Shima
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引用次数: 2

Abstract

A simulation method for optimizing dynamic motion of micro-electro-mechanical devices and systems (MEMS) is proposed. A series of equations of electrostatic field, fluid dynamics and deflection of micro-membrane are coupled and solved simultaneously. Since the genetic algorithm is appropriate to reduce the search space of solution, /spl square//spl square/ is used to optimize the thickness distribution of a micro-membrane. As an application of the developed method, the thickness distribution of the micro-membrane of a micro-air-pump is optimized. The prescribed performance of the micro-air-pump can be calculated.
基于遗传算法的微膜厚度分布优化
提出了一种微机电系统(MEMS)动态运动优化仿真方法。将静电场方程、流体动力学方程和微膜挠度方程耦合求解。由于遗传算法适合减小解的搜索空间,因此采用/spl平方//spl平方/来优化微膜的厚度分布。应用该方法对某微型气泵的微膜厚度分布进行了优化。可以计算出微型气泵的规定性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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