{"title":"Optimization of thickness distribution of micro-membrane by genetic algorithm","authors":"H. Kotera, M. Senga, T. Hirasawa, S. Shima","doi":"10.1109/IPMM.1999.792482","DOIUrl":null,"url":null,"abstract":"A simulation method for optimizing dynamic motion of micro-electro-mechanical devices and systems (MEMS) is proposed. A series of equations of electrostatic field, fluid dynamics and deflection of micro-membrane are coupled and solved simultaneously. Since the genetic algorithm is appropriate to reduce the search space of solution, /spl square//spl square/ is used to optimize the thickness distribution of a micro-membrane. As an application of the developed method, the thickness distribution of the micro-membrane of a micro-air-pump is optimized. The prescribed performance of the micro-air-pump can be calculated.","PeriodicalId":194215,"journal":{"name":"Proceedings of the Second International Conference on Intelligent Processing and Manufacturing of Materials. IPMM'99 (Cat. No.99EX296)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the Second International Conference on Intelligent Processing and Manufacturing of Materials. IPMM'99 (Cat. No.99EX296)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPMM.1999.792482","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
A simulation method for optimizing dynamic motion of micro-electro-mechanical devices and systems (MEMS) is proposed. A series of equations of electrostatic field, fluid dynamics and deflection of micro-membrane are coupled and solved simultaneously. Since the genetic algorithm is appropriate to reduce the search space of solution, /spl square//spl square/ is used to optimize the thickness distribution of a micro-membrane. As an application of the developed method, the thickness distribution of the micro-membrane of a micro-air-pump is optimized. The prescribed performance of the micro-air-pump can be calculated.