Cantilever-based resonant gas sensors with integrated recesses for localized sensing layer deposition

Abstract

This work presents mass-sensitive hammerhead resonators with integrated recesses as a gas-phase chemical microsensor platform. Recesses are etched into the head region of the resonator to locally deposit chemically sensitive polymers by ink-jet printing. This permits the sensing films to be confined to areas that (a) are most effective in detecting mass loading and (b) are not strained during the in-plane vibrations of the resonator. As a result of the second point, even 5-μm thick polymer coatings on resonators with a 9-12 μm silicon thickness barely affect the Q-factor in air. This translates into higher frequency stability and ultimately higher sensor resolution compared to uniformly coated devices.