{"title":"High-Performance Vertical Interlayer Coupler for Multilayer Silicon Nitride-on-Silicon Photonic Platform","authors":"Lirong Cheng, H. Fu, Xin Mu, X. Tu, Sailong Wu","doi":"10.1109/GROUP4.2019.8853942","DOIUrl":null,"url":null,"abstract":"We propose a vertical interlayer coupler for optical interconnections in multilayer silicon nitride-on-silicon photonic circuits with coupling efficiency of 96.0%. The coupler has a compact size of 170 μm in length and exhibits high performance in an ultra-broad bandwidth.","PeriodicalId":221282,"journal":{"name":"2019 IEEE 16th International Conference on Group IV Photonics (GFP)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE 16th International Conference on Group IV Photonics (GFP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/GROUP4.2019.8853942","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
We propose a vertical interlayer coupler for optical interconnections in multilayer silicon nitride-on-silicon photonic circuits with coupling efficiency of 96.0%. The coupler has a compact size of 170 μm in length and exhibits high performance in an ultra-broad bandwidth.