Design of graphene-based MEMS intracranial pressure sensor

Abstract

The present paper utilises COMSOL Multiphysics to model structural application of graphene as pressure sensor diaphragm. In this study, deflection and strain induced in a graphene diaphragm due to applied pressure were calculated. Pressure operation of the sensor is divided into two ranges, namely normal pressure and abnormal pressure to find the suitable design for these different pressure ranges. Changes in the band structure can be detected electrically, suggesting a potential application as the ultra-sensitive pressure sensor. This study has paved a new path to discover the feasibility of utilising the thinness of graphene membrane in MEMS piezoresistive pressure sensor specifically in intracranial pressure monitoring.