{"title":"Study of field emission arrays for travelling wave tubes","authors":"Xinghui Li, Fujiang Liao, M. Ding, Guodong Bai, Fuquan Zhang, Jinjun Feng","doi":"10.1109/IVEC.2003.1286402","DOIUrl":null,"url":null,"abstract":"The Spindle type FEAs were fabricated using n-type silicon wafers with different resistivities. The I-V measurements and emission characteristics of FEAs made from high resistivity wafers indicated that the emission performance was greatly improved. The FEAs were coated with a thin layer of nanocrystalline diamond film (NCD) using microwave plasma chemical vapour deposition (MPCVD). Scanning electron microscopy (SEM) observations of FEAs were made before coating NCD and after coating NCD.","PeriodicalId":203178,"journal":{"name":"4th IEEE International Conference on Vacuum Electronics, 2003","volume":"143 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"4th IEEE International Conference on Vacuum Electronics, 2003","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVEC.2003.1286402","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The Spindle type FEAs were fabricated using n-type silicon wafers with different resistivities. The I-V measurements and emission characteristics of FEAs made from high resistivity wafers indicated that the emission performance was greatly improved. The FEAs were coated with a thin layer of nanocrystalline diamond film (NCD) using microwave plasma chemical vapour deposition (MPCVD). Scanning electron microscopy (SEM) observations of FEAs were made before coating NCD and after coating NCD.