Node supported varifocal mirror

2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI:10.1109/OMN.2019.8925292

Takashi Sasaki, Takuro Kamada, K. Hane

引用次数: 0

Abstract

We propose and test a node supported varifocal mirror for high speed and large displacement actuation. The mirror diameter of fabricated device was 1 mm. The maximum quality factor was obtained at node supported condition. The resonant frequency and quality factor of the fabricated device were 391 kHz and 280 under the vacuum condition.

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节点支持的变焦镜像

我们提出并测试了一种节点支持的高速大位移驱动变焦镜。所制器件的反射镜直径为1mm。在节点支撑条件下，质量因子达到最大值。在真空条件下，该器件的谐振频率为391 kHz，品质因数为280。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2019 International Conference on Optical MEMS and Nanophotonics (OMN)

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