Studying the Effect of Seed-layers of Zinc Oxide Nanostructured Thin Film for Liquefied Petroleum Gas Sensor Application

G. Gyanwali
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Abstract

Gas sensors are devices that can convert the concentration of an analyte gas into an electronic signal. Zinc oxide (ZnO) is one of the most important n-type metal oxide semiconductor which has been utilized as gas sensor for many years. In this work, ZnO nanostructured films were synthesized by a hydrothermal growth from ZnO seeds and used as a liquefied petroleum gas (LPG) sensor. At first ZnO seed layers were deposited on glass substrates by using spin coating method, then ZnO nanostructured were grown on these substrates by using hydrothermal growth method. The effect of seed layers of ZnO nanostructured on its structural, optical, and electrical properties was studied. These nanostructures were characterized by scanning electron microscopy, X-ray diffraction, optical spectroscopy, and sheet resistance measurement unit. The sensing performances of the synthetic ZnO nanostructures were investigated for LPG. XRD showed that all the ZnO nanostructures were hexagonal crystal structure. ZnO nanostructured thin film showed high sensitivity towards LPG gas. The sensitivity of the film is observed to increase with increase in number of seed layers. The sensitivity of the film was investigated by measured change in sheet resistance under with LPG gas.
氧化锌纳米薄膜种子层在液化石油气传感器中的应用研究
气体传感器是一种可以将分析气体的浓度转换为电子信号的装置。氧化锌(ZnO)是一种重要的n型金属氧化物半导体,多年来一直被用作气体传感器。本文以ZnO种子为原料,采用水热法合成了ZnO纳米结构薄膜,并将其用作液化石油气(LPG)传感器。首先采用自旋镀膜法在玻璃衬底上沉积ZnO种子层,然后采用水热生长法在玻璃衬底上生长ZnO纳米结构。研究了ZnO纳米结构种子层对其结构、光学和电学性能的影响。通过扫描电子显微镜、x射线衍射、光谱学和薄片电阻测量装置对这些纳米结构进行了表征。研究了合成ZnO纳米结构对LPG的传感性能。XRD分析表明,ZnO纳米结构均为六方晶体结构。ZnO纳米结构薄膜对LPG气体具有较高的灵敏度。薄膜的灵敏度随种子层数的增加而增加。通过测量液化气作用下薄膜电阻的变化,研究了薄膜的灵敏度。
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