A novel design of RF MEMS shunt switch with dimples and meanders

Abstract

The paper presents the design of an RF MEMS capacitive shunt switch with the use of dimples and meanders. With optimized meander structure and the use of two dimples below the bridge, the switch presents excellent RF performance. The EM modeling and results are achieved in HFSS and the mechanical modeling and stress analysis is done in ANSYS. The bridge structure with dimples and meanders shows the insertion loss to be less than 0.09 dB up to 35GHz and the isolation as high as 29 dB up to 40GHz. The calculated actuation voltage is 59V.