System level simulation — A core method for efficient design of MEMS and mechatronic systems

Abstract

Design of micro systems, MEMS or mechatronic systems is dominated by the interaction of effects from different physical domains. One important approach to decrease the number of design cycles significantly is system level modeling and simulation. The main challenges for the efficient use of modeling and simulation are a systematic approach for behavioral modeling, automated model generation as well as powerful simulation frameworks. Especially for the latter flexible handling of different models of computation is crucial.