Dielectric properties of DLC films in sensor applications

Abstract

Summary form only given. The market for biocompatibility materials and structures is growing steadily. Among these materials there are carbon layers, especially nanocrystalline (NCD) and diamond like carbon (DLQ) layers that are being increasingly investigated. These layers can act as biocompatible coatings as well as sensitive organic polar compounds. The layers under study were obtained on silicon substrate through low pressure plasma CVD methods. The layers were defined with the use of C-V and I-V characteristics. AFM and SEM methods were used to study the layer structure. An ellipsometric study was also conducted. This research allowed the authors to ascertain the fact that DLC and NDC layers act as dielectrics while their properties are very much dependent on the state of the layer-metal contacts. The impact of the environment for Al electrodes on the electrophysical parameters of DLC and NDC layers was also examined.